NRC seeks automated wafer inspection and ICP plasma module for photonics fabrication.
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The National Research Council Canada (NRC), through the Canadian Photonics Fabrication Centre (CPFC), intends to award a contract for an Automated Wafer Defect Inspection and Surface Characterization System (SDIP) and an Inductively Coupled Plasma (ICP) Processing Module compatible with the existing KLA/SPTS Omega fxP platform. The SDIP must inspect compound semiconductor wafers (GaAs, InP, GaN, etc.) for defects and provide automated handling and data analysis. The ICP module must integrate with the existing Omega fxP system for high-density plasma etching of compound semiconductors. This is an Advance Contract Award Notice (ACAN) with a pre-identified supplier; other suppliers may submit statements of capabilities by the closing date. The contract includes supply, delivery, installation, commissioning, training, and support.